| 摘要 |
An accelerometer (10) includes a pair of conductive plates (36, 38) fixedly mounted on a substrate (12) surface, a structure coupled to the substrate surface and suspended above the conductive plates, and at least one protective shield (44, 46) mounted on the substrate surface. The structure includes two regions (28, 30) of differing total moments disposed above a respective conductive plate and separated by a flexure axis (26) about which the structure rotates during an acceleration normal to the substrate, each region (28, 30) having a substantially planar outer surface and an inner surface having a first corrugation (32, 34) formed thereon. For each of the two regions, an inner gap exists between the first corrugation and an opposing conductive plate, and an outer gap exists between the substantially planar outer surface and the opposing conductive plate, the outer gap being larger than the inner gap. The at least one protective shield (44, 46) is placed apart from either of the conductive plates (36, 38). |
