| 摘要 |
PROBLEM TO BE SOLVED: To improve an enlargement ratio of a projected image acquired by imaging, while suppressing brightness attenuation of the projected image, by using an X-ray two-dimensional detector placed in a device having a limited space. SOLUTION: The imaging position of the two-dimensional detector is set at even-numbered spots Pos1, 2, 3, 4 which are plane-symmetrical with respect to a plane including a perpendicular drawn from an X-ray focal point to an initial position detection surface 20a of the two-dimensional detector and parallel to an initial position rotation axis 50 of an inspection object. In this case, the imaging position does not include the initial position Pos0. The projected image in each angle phase is imaged at each imaging position Pos1, 2, 3, 4, and reconstruction calculation is performed by using the whole projected image acquired by synthesizing each imaged partial projected image, to thereby reconstruct internal structure data of the inspection object. Preferably, reconstruction calculation is performed from a projected image acquired by projecting the projected image in each angle phase acquired at each imaging position onto a virtual cylindrical surface 60 having a straight line parallel to the rotation axis of the inspection body and passing the X-ray focal point as the center axis, and then the internal structure data are reconstructed. COPYRIGHT: (C)2008,JPO&INPIT
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