| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that a conventional XYZ table with a linear motor has a burden of a leakage flux supporting mechanism. SOLUTION: A linear motor has one magnetic pole tooth row magnetically connected to one magnetic pole of an armature and disposed in a roughly orthogonally to the traveling direction of a mover so as to be divided into a first stage and a second stage, and the other magnetic pole tooth row magnetically connected to the other magnetic pole of the mover and disposed roughly orthogonally to the traveling direction of a mover so as to be divided into a first stage and a second stage. In the motor, the magnetic pole tooth of the first stage of one magnetic pole tooth row and the magnetic pole tooth of the first stage of the other magnetic pole tooth row are disposed alternately in the traveling direction of the mover, the magnetic pole tooth of the second stage of one magnetic pole tooth row and the magnetic pole tooth of the second stage of the other magnetic pole tooth row are disposed alternately in the traveling direction of the mover, and the mover is disposed between the first stage of the one and the other magnetic pole tooth row and the second stage of the one and the other magnetic pole tooth row. |
