| 摘要 |
A small volume resist dispenser includes a suck-back capable pressure operated valve, connectable to a nozzle of a spin coater and to a controller output arranged to open and close the valve to control liquid supply to the spin-coater. The dispenser comprises a holder for a bottle and arranged to pressurize a fluid in the bottle by applying gas pressure. The dispenser is suitable for use with, for example, pre-filled resist sample bottles containing resist samples of 100 ml to 300 ml resist solution.
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