发明名称 INTERVAL ADJUSTMENT DEVICE AND ADJUSTMENT METHOD
摘要 PROBLEM TO BE SOLVED: To provide an interval adjustment device capable of making the mutual interval of respective piece shape bodies as regular as possible.SOLUTION: An interval adjustment device 10 for adjusting the mutual interval of a plurality of piece shape bodies stuck onto an expandable/contractible adhesive sheet AS by predetermined energy includes energy imparting means 30 for imparting a predetermined energy to the adhesive sheet AS, and measurement means 40 capable of measuring the mutual interval of the piece shape bodies CP. The energy imparting means 30 imparts a predetermined energy to the adhesive sheet AS partially, based on the measurement results from the measurement means 40.SELECTED DRAWING: Figure 1
申请公布号 JP2016111187(A) 申请公布日期 2016.06.20
申请号 JP20140247091 申请日期 2014.12.05
申请人 LINTEC CORP 发明人 MENJU TOSHIAKI
分类号 H01L21/683;H01L21/52 主分类号 H01L21/683
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