| 摘要 |
PROBLEM TO BE SOLVED: To provide a gyro element excellent in detection sensitivity, the method of manufacturing the same, and a gyro sensor, an electronic device and a moving body which have the same.SOLUTION: The gyro element 100 includes: a stem 10; vibration arms for drive 12a, 12b which extend from the stem 10 and are driven to vibrate; vibration arms for detection 14a, 14b which extend from the stem 10 and have electrodes for detection 42a-45b for outputting electric charge according to a Coriolis force applied to the vibration arms for drive 12a, 12b; and vibration arms for adjustment 16a, 16b which extend from the stem 10 and have electrodes for adjustment 62a-65b. The gyro element changes connection of electric wiring 46a, 46b, 66a, 66b from the electrodes for adjustment 62a-65b to the electrodes for detection 42a-45b according to the polarity of the electric charge generated by the electrodes for detection 42a-45b when no Coriolis force is applied to the vibration arms for drive 12a, 12b.SELECTED DRAWING: Figure 1 |
