发明名称 Flexible microsystem structure
摘要 A flexible microsystem structure is provided. The flexible microsystem structure includes a flexible substrate; and a chip disposed over the flexible substrate, wherein the chip is bonded to the flexible substrate by a plurality of bonding elements disposed over the flexible substrate; wherein the flexible substrate has at least one trench disposed under the chip and disposed along at least one side of at least one of the bonding elements.
申请公布号 US9412692(B2) 申请公布日期 2016.08.09
申请号 US201514596079 申请日期 2015.01.13
申请人 WINBOND ELECTRONICS CORP. 发明人 Cheng Yu-Ting;Fu Yu-Min
分类号 H01L29/15;H01L23/498;H01L23/00 主分类号 H01L29/15
代理机构 Muncy, Geissler, Olds & Lowe, P.C. 代理人 Muncy, Geissler, Olds & Lowe, P.C.
主权项 1. A flexible microsystem structure, comprising: a flexible substrate; and a chip disposed over the flexible substrate, wherein the chip is bonded to the flexible substrate by a plurality of bonding elements disposed over the flexible substrate; wherein the flexible substrate has at least one trench disposed under the chip and disposed along at least one side of at least one of the bonding elements, wherein a width of the trench is smaller than a width of the bonding element.
地址 Taichung TW