发明名称 |
Flexible microsystem structure |
摘要 |
A flexible microsystem structure is provided. The flexible microsystem structure includes a flexible substrate; and a chip disposed over the flexible substrate, wherein the chip is bonded to the flexible substrate by a plurality of bonding elements disposed over the flexible substrate; wherein the flexible substrate has at least one trench disposed under the chip and disposed along at least one side of at least one of the bonding elements. |
申请公布号 |
US9412692(B2) |
申请公布日期 |
2016.08.09 |
申请号 |
US201514596079 |
申请日期 |
2015.01.13 |
申请人 |
WINBOND ELECTRONICS CORP. |
发明人 |
Cheng Yu-Ting;Fu Yu-Min |
分类号 |
H01L29/15;H01L23/498;H01L23/00 |
主分类号 |
H01L29/15 |
代理机构 |
Muncy, Geissler, Olds & Lowe, P.C. |
代理人 |
Muncy, Geissler, Olds & Lowe, P.C. |
主权项 |
1. A flexible microsystem structure, comprising:
a flexible substrate; and a chip disposed over the flexible substrate, wherein the chip is bonded to the flexible substrate by a plurality of bonding elements disposed over the flexible substrate; wherein the flexible substrate has at least one trench disposed under the chip and disposed along at least one side of at least one of the bonding elements, wherein a width of the trench is smaller than a width of the bonding element. |
地址 |
Taichung TW |