| 摘要 |
PROBLEM TO BE SOLVED: To accurately estimate a position of a workpiece reference mark to move the workpiece reference mark to a conveyance target point with high precision.SOLUTION: A finger reference mark 202 is formed on a finger 201. An image processing part of a control unit 400 measures positions of a finger reference mark 202 and a workpiece reference mark 102 by a picked-up image of a camera 300. A controlling part of the control unit 400 obtains a deviation amount of a measuring position of the finger reference mark measured at the image processing part to the detection position of the finger reference mark 202 detected at a position detection part of the control unit 400. The controlling unit estimates a position of the workpiece reference mark regarding the deviation amount as deviation amount of the measuring position of the workpiece reference mark measured at the image processing part. The controlling unit determines a travel amount of a finger 201 so as to align the estimated position of the workpiece reference mark 102 and a conveyance target point, and controls a stage 500 such that the finger 201 moves for the travel amount. |
