| 摘要 |
PROBLEM TO BE SOLVED: To allow cable to be wired without limiting the internal space of a vacuum chamber, and to prevent a cable from being caught up by an ion beam irradiation device and thereby broken, as well as prevent the cable from being deteriorated by irradiation of an ion beam and gases from being generated from the cable.SOLUTION: In an ion beam irradiation device, a substrate holding member 2 changes the direction of the substrate from a horizontal to a vertical direction and vice versa and also moves the substrate along a rail 18 between a region where an ion beam is irradiated and a region where no ion beam is irradiated. The substrate holding member 2 is connected to a vacuum chamber side by a link 4 which is rotatably connected at one end to the vacuum chamber side and connected at the other end to the substrate holding member 2. The link 4 has a cable for supplying power to a drive device installed on the substrate holding member 2 side wired along the surface thereof and is provided therein with a passage to send a fluid for cooling the substrate holding member 2 or the drive device. |
