| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate supporter capable of suppressing processing on a rear side of a substrate that is mounted on a substrate plate, while preventing the substrate from being damaged during substrate transfer.SOLUTION: The substrate supporter is configured to support a substrate on a substrate mounting surface that extends in a vertical direction of a substrate plate. The substrate supporter comprises: a neck part that is fixed to the substrate plate; and a claw part that is coupled to the neck part at a position away from the position where the neck part is fixed to the substrate plate, and includes a projection that faces the substrate supported on the substrate plate. The substrate is supported by the neck part between the substrate plate and the claw part, and the neck part exposed on a surface of the substrate plate is longer than thickness of the substrate by 0.05 mm to 0.2 mm.SELECTED DRAWING: Figure 2 |
