| 摘要 |
PURPOSE:To prepare a large amt. of whisker efficiently in the titled process executed in vapor phase by introducing gaseous silane compd. and gaseous hydrocarbon into a zone for decomposing thermally a gaseous compd. contg. transition metal and passing the silane compd. gas and the hydrocarbon gas therethrough. CONSTITUTION:A boat 6 having a specified length and width is placed to a center of a zone 2 in an Al furnace core tube 2 having a specified inside diameter (dia.) and length being set horizontally in a two-zone electric tubular furnace 1 provided with a heater 5. The temp. of the zones 1, 2 are held at ca. 600 deg.C and ca. 1,500 deg.C, respectively. A top end and anothr to pend of the pipe provided to the feed side of the gas to the pipe 2 are fixed so that the position of the top end (A) comes to the zone 1 and the position of another end (B) comes to one zone nearer to the feed side. Fe(C5H5)2 vapor previously fed from an external vaporizer set at ca. 200 deg.C is made to be carried by gaseous H2 having a specified flow rate through (A) into the furnace, and a specified amt. of gaseous H2 contg. a specified amt. of SiH4 and CH4 is introduced simultaneously from (B). After a specified time, the feed of Fe(C5H5)n is stopped, and after further introducing gaseous H2 contg. SiH4 and CH4 for a further specified time, the furnace is cooled and the boat 6 is taken out. |
