MICRO-MIRROR ACTUATOR

摘要

PURPOSE: A micro-mirror actuator is provided to maintain rotating angle of mirror accurate and stable, while maintaining tilt angle of the mirror constant despite of the change of intensity of magnetic field. CONSTITUTION: A micro-mirror actuator comprises a substrate(10); posts(20a,20b) arranged onto the substrate, such that two posts are spaced apart from each other; a torsion bar(31) having both ends fixed to the upper end of the posts; a mirror(30) coupled to the torsion bar; and a magnet(40) arranged at the mirror. The substrate has a channel(50) that has a tilt contact surface(51) where the bottom surface of the substrate contacts when the mirror is rotated. The tilt contact surface of the channel has a clamping electrode for generating an electrostatic force with respect to the substrate.