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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04155867(A)
申请公布日期
1992.05.28
申请号
JP19900281252
申请日期
1990.10.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
MAEKAWA KAZUYOSHI
分类号
H01L23/52;H01L21/28;H01L21/3205;H01L21/768;H01L29/43
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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