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发明名称
SCANNING-TYPE TUNNEL MICROSCOPE
摘要
申请公布号
JPH0587513(A)
申请公布日期
1993.04.06
申请号
JP19910248778
申请日期
1991.09.27
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
FUJITA YOSHIJI
分类号
G01B7/34;G01Q10/02;G01Q60/10;G05D3/00
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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