Method of position detection and the method and apparatus of printing patterns by use of the position detection method

摘要

A method for detecting position detection marks on the bottom surface of a sample substrate and for determining the pattern forming positions on the top surface of the sample on the basis of the detected mark positions makes it possible to virtually eliminate the measurement errors caused by sample tilt in the position measurements regarding the sample top surface. When the sample tilts, a positional difference occurs between the top and bottom surfaces of the sample, and errors are accordingly generated in the position measurements from the sample top surface. According to the invention, the mark position measurements from the sample bottom surface are made to contain a deviation that varies with the tilt angle of the sample. The deviation is used to cancel the errors in the measured positions.