发明名称 |
NON-CONTACT HOLDER FOR WAFER-LIKE ARTICLES |
摘要 |
A holder for wafer-like articles is formed by providing a platform having a wafer-like article facing surface that includes at least one annular groove therein. The annular groove has a ceiling surface therein which is provided with an opening. A gas conducting conduit is connected to the opening. A gas, which introduced into the conduit, exits the conduit through the opening. By choosing a particular orientation of the conduit relative to the annular groove, the gas exiting the opening can be caused to circulate in a clockwise or counter clockwise fashion. The circular flow of gas causes the formation of a vortex adjacent to the article facing surface. A wafer-like article may be held in a suspended state adjacent to the wafer-like article facing surface without contact by the vortex and the gas flowing between the wafer-like article and the article facing surface.
|
申请公布号 |
WO9745862(A1) |
申请公布日期 |
1997.12.04 |
申请号 |
WO1997US08626 |
申请日期 |
1997.05.21 |
申请人 |
IPEC PRECISION, INC.;SINIAGUINE, OLEG;STEINBERG, GEORGE |
发明人 |
SINIAGUINE, OLEG;STEINBERG, GEORGE |
分类号 |
H01L21/677;H01L21/68;H01L21/683;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|