Raster electron microscope

摘要

The electron microscope includes an arrangement (1) for generating an electron beam (2), an arrangement (24) for generating an information signal which is characteristic for a sample, through scanning of the sample through the electron beam, an arrangement (14a,14b) for detecting the produced information signal, and an arrangement (15) for producing an observation image of the test in response to the recorded information signal. A first arrangement (16) is provided for storing the produced observation image as an image, a second arrangement (24) reads the stored image for specifying a view position, and a third arrangement (15) displays the observation image and the read image for specifying the view position on individual image display sections (22, 23). A fourth arrangement (18) is provided for specifying a view position on the displayed image, and a fifth arrangement (19) for controlling the position of the electron beam on the test in such way, that the specified view position can be shifted to a predetermined position on the display screen area, and that image can be displayed on this screen area, which corresponds to the specified view position.