| 摘要 |
PURPOSE:To improve dimensional accuracy of the subject substrate by calcining plural formed articles consisting essentially of AlN and then arranging the calcined articles in a cavity of hot press machine, arranging specific spacers between outer circumferences thereof and the cavity and sintering the calcined articles. CONSTITUTION:100 pts.wt. AlN powder is kneaded with about 5 pts.wt. acrylic binder to give a rectangular formed article 7 and a number of through-holes 8 are formed therein and then metallized paste is packed therein. The plural formed articles 7 are arranged in a cavity of hot press machine and a spacer 9 is arranged between the each formed article and a cavity 5. The formed articles are heated to about 1400 deg.C at ordinary pressure and calcined in an inert atmosphere for about 4hr. Then N2 gas is introduced into the cavity and the each formed article is heated at about 1400-1700 deg.C for 15-20min and further sintered at about 1850 deg.C for about 1hr to provide the AlN substrate having 3.24-3.26g/cm<2> density. |
