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发明名称
ALIGNMENT METHOD
摘要
申请公布号
KR0153792(B1)
申请公布日期
1999.02.01
申请号
KR19940004313
申请日期
1994.03.05
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
SENDA, SHINYA;HARAGUCHI, HIROSHI
分类号
G01B11/00;G03B27/32;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):H01L21/027
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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