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发明名称
SUBSTRATE CLEANING DEVICE
摘要
申请公布号
JPH11204482(A)
申请公布日期
1999.07.30
申请号
JP19980003997
申请日期
1998.01.12
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
NISHIMURA JOICHI;MORINISHI TAKEYA
分类号
H01L21/304;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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