Gripping and holding apparatus for a flat substrate e.g. a compact disk substrate during vacuum thin film coating

摘要

A flat substrate gripping and holding apparatus is designed for rapid gripping and holding of a substrate (14) and compensation of slight substrate supply irregularity and inaccuracy to avoid substrate damage. Apparatus for gripping and holding a flat preferably circular disc-shaped substrate (14) has: (a) a housing (3) surrounded by a holder (10) with a central opening; (b) elastic elements (13) distributed about the surrounding housing portion (9) between the holder and the housing, each element having one half located in a recess in the housing portion (9) and the other half located in an opposite recess in the holder (10); (c) gripper recesses (4) extending radially outwards in a plane transverse to the housing axis; and (d) grippers (5), each having a first arm forming a slide shoe which can slide radially in the recess (4) and a second arm which extends at right angles to the first arm and parallel to the housing axis and which has a notch at its free end for gripping a central opening of the substrate (14).