| 摘要 |
PROBLEM TO BE SOLVED: To suppress the irregular temperature fluctuation in melt which disturbs uniform crystal growth. SOLUTION: In a floating zone(FZ) method, the partial pressure of oxygen, or the like, among ingredients contained in an atmosphere surrounding a melt is controlled so as to be especially >=1.8 E(-5) MPa. The temperature oscillation in the melt is made to have a single period, the turbulence of the temperature oscillation disappears, and a highly uniform crystal can be formed. In a Czochralski method, also, the partial pressure of oxygen, or the like, among ingredients contained in an atmosphere surrounding a melt is controlled so as for the surface oxygen pressure to have an elevated pressure. The intensity of a Marangoni convection on the melt surface is reduced, and the temperature oscillation in the melt is made to have a single period, the turbulence of the temperature oscillation disappears and also oxygen concentration in a crystal can be controlled, and a highly uniform crystal can be formed.
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