发明名称 |
Chemical-liquid controlling apparatus |
摘要 |
A chemical-liquid controlling apparatus is described. The chemical-liquid controlling apparatus is mounted between a chemical-liquid container and an exhaust apparatus. During a chemical-liquid refilling process, once the chemical liquid is drawn out of the container by the exhaust apparatus, the chemical liquid first enters the chemical-liquid controlling apparatus. The chemical-liquid controlling apparatus separates the chemical liquid from a nitrogen gas and a chemical gas. In addition, the chemical-liquid refilling process is stopped by a signal transmitted from a leak sensor.
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申请公布号 |
US6165255(A) |
申请公布日期 |
2000.12.26 |
申请号 |
US19990267845 |
申请日期 |
1999.03.12 |
申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
LAI, CHIEN-HSIN;PENG, PENG-YIH;CHANG, LI-MIN;YU, FU-YANG |
分类号 |
B01D19/00;(IPC1-7):B01D19/00 |
主分类号 |
B01D19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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