| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a thermal flowmeter reducing the non-uniformity due to the place of temperature distribution in a housing including a flowing fluid and reducing the lowering of the detection accuracy of a flow rate. SOLUTION: The outlet provided to the upper part of the fluid flow channel, which is vertically formed to the flow rate measuring part 8 arranged in the recessed part 23 for a fluid storage part allowed to communicate with a fluid inlet pipe through an opening 21a, communicates with a fluid outlet pipe 22 through an opening 22a. The thermal flow rate sensor 10 arranged to the flow rate measuring port 8 has the fin plate projected to the fluid flow channel through a sensor mounting hole 8c. An auxiliary flow channel for guiding the fluid in the recessed part 23 for the fluid storage part to the inlet 811 provided to the lower part of the fluid flow channel is formed to the flow rate measuring part 8 to extend in parallel to the fluid flow channel to have fluid introducing ports 822, 823 and 824 and the fluid lead-out port 821 to the fluid flow channel. A bottom plate 8d forming the communication passage from the fluid lead-out port 821 to the inlet 811 of the fluid flow channel is provided to the flow rate measuring part 8.</p> |
