发明名称 |
Thin-film processing electromagnet with modified core for producing low-skew magnetic orientation |
摘要 |
An electromagnet having one or more coils wrapped around a plate-shaped core produces a uniaxial magnetic field in the vicinity of a substrate surface for orienting a magnetic film deposited onto the substrate surface. Variations in the magnetic mass of the plate-shaped core or in the magnetic permeability of the core mass are made to reduce angular skew and to improve uniformity of the uniaxial magnetic field. The variations generally involve a reduction in magnetic mass or permeability near a center of the core with respect to a periphery of the core. Cavities of various sizes and shapes but having symmetry with a magnetic axis can be formed in the core for this purpose.
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申请公布号 |
US6475359(B1) |
申请公布日期 |
2002.11.05 |
申请号 |
US20000595932 |
申请日期 |
2000.06.16 |
申请人 |
CVC PRODUCTS, INC. |
发明人 |
MOSLEHI MEHRDAD M.;CHENG SHIYUAN;CHEN XIANGQUN;DAVIS CECIL J. |
分类号 |
C23C14/34;C23C14/35;C23C16/08;C23C16/10;C23C16/16;C23C16/18;H01F3/02;H01F7/06;H01F7/20;(IPC1-7):C14C14/35;H01F5/00 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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