TUBULAR REACTION VESSEL AND PROCESS FOR PRODUCING SILICON THEREWITH

摘要

A reaction vessel that avoids excessive temperature load on constituent members thereof, enabling smooth fall and recovery of formed silicon and that even when scaled up to industrially large-dimension production facilities, ensures efficient reaction of raw gases for silicon precipitation and inhibits the occurrence of silicon micropowder and silane oligomer components, thereby realizing long-term industrial production of silicon. In particular, there is provided a tubular reaction vessel having a space surrounded by a vertically extending wall, characterized in that an inflow port for raw gases for silicon precipitation is disposed at an upper part thereof and a precipitated silicon discharge port at a lower end thereof and that flow resistance increase sites are provided on a wall surface of tubular reaction vessel brought into contact with raw gases. The flow resistance increase sites are each at least one selected from among a protrusion, depressed portion and inclination.