ELECTROSTATIC ACTUATOR AND CAMERA MODULE

摘要

PROBLEM TO BE SOLVED: To obtain an electrostatic actuator that is integrated with a detection device in an absolute position and does not cause an increase in the number of part items, and a camera module using the actuator. SOLUTION: The electrostatic actuator 1 of a simple constitution is obtained such that: a first electrode 22 is divided into two pieces of divided electrodes L and R that are divided in a cylinder passing direction; a strip electrode area that constitutes the divided electrode L or R has a value proportional to a position in the cylinder passing direction; the divided electrodes L and R are brought into a connected state or a separated state by electrically being turned on and off by a switch 80; electrostatic capacitances of the divided electrode L and a third electrode 24 are obtained by a measurement means 70 when the switch 80 is turned off; the measurement of the absolute position of a movable body 14 and the movement of the movable body 14 are performed by using the first electrode 22 since the movable body 14 is programmed to be moved when the switch 80 is turned on; and the absolute position of the movable body 14 can be measured. COPYRIGHT: (C)2005,JPO&NCIPI