| 摘要 |
PROBLEM TO BE SOLVED: To reduce costs, improve long-term reliability, and improve the precision and reliability of measuring signals in a pressure sensor device. SOLUTION: A pressure sensor chip 41 including a diaphragm 45, a piezoresistive element, an amplification circuit, and various regulating circuits is connected to a pedestal member 42 so that the diaphragm 45 faces a through hole 46 of the pedestal member 42. The pedestal member 42 and a metal pipe member 43 are connected so that their through holes 46, 48 communicate with each other. A protective film 60 is formed so that the connection part between the pedestal member 42 and the metal pipe member 43 is covered. The metal pipe member 43 is glued to a resin case 44, and then a signal terminal 58 of the resin case 44 and the pressure sensor chip 41 are electrically connected through wire bonding 59, thereby forming a pressure sensor cell 100. COPYRIGHT: (C)2007,JPO&INPIT |
