| 摘要 |
Fluorine compounds such as C<SUB>2</SUB>F<SUB>6</SUB>, CF<SUB>4</SUB>, CHF<SUB>3</SUB>, SF<SUB>6 </SUB>and NF<SUB>3</SUB>, are made to contact with a fluorine compound decomposition catalyst and a catalyst for the decomposition of at least one of CO, SO<SUB>2</SUB>F<SUB>2 </SUB>and N<SUB>2</SUB>O in the presence of water or in the presence of water and oxygen. The catalyst for the decomposition of at least one of CO, SO<SUB>2</SUB>F<SUB>2 </SUB>and N<SUB>2</SUB>O preferably contains at least one selected from Pd, Pt, Cu, Mn, Fe, Co, Rh, Ir and Au in the form of a metal or an oxide. According to the invention, the fluorine compound can be converted to HF, which can be absorbed by water or an alkaline aqueous solution. Furthermore, a substance such as CO, SO<SUB>2</SUB>F<SUB>2 </SUB>and N<SUB>2</SUB>O which is formed by decomposition of the fluorine compound can also be decomposed.
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