ULTRASONIC VIBRATOR, AND MANUFACTURING METHOD THEREOF

摘要

An ultrasonic transducer in which lead wire connection is facilitated even when piezoelectric devices are divided in order to prevent lateral vibrations from affecting longitudinal vibrations is manufactured by a method comprising: a step in which first dicing grooves are formed on an acoustic matching layer and a piezoelectric device plate that are mounted together in order to form a plurality of piezoelectric devices; a step in which a board and the respective piezoelectric devices are connected together; a step in which surfaces in the vicinity of locations at which the board and the piezoelectric devices are connected together are coated with a conductive sheet; and a step in which the plurality of transducer elements are formed by forming second dicing grooves between the first dicing grooves formed on the piezoelectric devices and the board that is coated with the conductive sheet and on the acoustic matching layer.