发明名称 Semiconductor device and manufacturing method therefor
摘要 To provide devices relating to a manufacturing method for a semiconductor device using a laser crystallization method, which is capable of reducing a cost involved in a design change, preventing a grain boundary from developing in a channel formation region of a TFT, and preventing a remarkable reduction in mobility of the TFT, a decrease in an ON current, and an increase in an OFF current due to the grain boundary and to a semiconductor device formed by using the manufacturing method. In a semiconductor device according to the present invention, among a plurality of TFTs formed on a base film, some TFTs are electrically connected to form logic elements. The plurality of logic elements are used to form a circuit. The base film has a plurality of projective portions having a rectangular or stripe shape. Island-like semiconductor films included in each of the plurality of TFTs are formed between the plurality of projective portions and also, are crystallized by a laser light scanned in a longitudinal direction of the projective portions.
申请公布号 US7326961(B2) 申请公布日期 2008.02.05
申请号 US20050107822 申请日期 2005.04.18
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 YAMAZAKI SHUNPEI;ISOBE ATSUO;TAKANO TAMAE;MIYAIRI HIDEKAZU
分类号 H01L29/72;H01L21/20;H01L21/77;H01L21/84;H01L27/12 主分类号 H01L29/72
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