发明名称 COMPOSITION FOR STRIPPING PHOTORESIST AND METHOD FOR MANUFACTURING THIN TRANSISTOR ARRAY PANEL USING THE SAME
摘要 The present invention provides a photoresist stripper including about 5 wt % to about 20 wt % alcohol amine, about 40 wt % to about 70 wt % glycol ether, about 20 wt % to about 40 wt % N-methyl pyrrolidone, and about 0.2 wt % to about 6 wt % chelating agent.
申请公布号 US2008032432(A1) 申请公布日期 2008.02.07
申请号 US20070873791 申请日期 2007.10.17
申请人 发明人 PARK HONG-SICK;JEONG JONG-HYUN;YOON SUK-IL;KIM SEONG-BAE;KIM WY-YONG;HUH SOON-BEOM;KIM BYUNG-UK
分类号 H01L21/311 主分类号 H01L21/311
代理机构 代理人
主权项
地址