发明名称 Method for manufacturing a printed circuit board with a thin film capacitor embedded therein having a dielectric film by using laser lift-off, and printed circuit board with a thin film capacitor embedded therein manufactured thereby
摘要 A method for manufacturing a printed circuit board with a capacitor embedded therein which has a dielectric film using laser lift off, and a capacitor manufactured thereby. In the method, a dielectric film is formed on a transparent substrate and heat-treated. A first conductive layer is formed on the heat-treated dielectric film. A laser beam is irradiated onto a stack formed, from below the transparent substrate, to separate the transparent substrate from the stack. After the transparent substrate is separated from the stack, a second conductive layer is formed with a predetermined pattern on the dielectric film. Also, an insulating layer and a third conductive layer are formed on the first and second conductive layers to alternate with each other in a predetermined number.
申请公布号 US2008030969(A1) 申请公布日期 2008.02.07
申请号 US20070808298 申请日期 2007.06.08
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 LEE JUNG W.;CHUNG YUL K.;LEE IN HYUNG
分类号 H05K7/02;H01L21/62 主分类号 H05K7/02
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