发明名称 CENTRIPETALISM METHOD OF DISK OBJECT
摘要 <P>PROBLEM TO BE SOLVED: To provide a centripetalism method of a disk object for performing centripetalism of a notch formed at any position correctly in the disk object using two sensors. <P>SOLUTION: Two centripetalism sensors, which detect an edge of a disk object (3) placed at a conveyance way (5) are so located that they are subjected to eccentricity with respect to a conveyance reference axis of the disk object, which is conveyed between the primary placement table (1) and the secondary placement table (6), while the space between them is made larger than the width of a notch. From four triangles, which are made from four pieces of edge positional information of the disk object obtained by two centripetalism sensors, two triangles, which contain a long diagonal line, are chosen. A circumferential triangle, which has three points on an outer perimeter of the disk object, is judged from the length of each side of two triangles, and the center of the disk object is detected from the circumferential triangle. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009088398(A) 申请公布日期 2009.04.23
申请号 JP20070258940 申请日期 2007.10.02
申请人 OLYMPUS CORP 发明人 TSUCHISAKA SHINICHI
分类号 H01L21/68;H01L21/027 主分类号 H01L21/68
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