| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid immersion lithographic apparatus, in which the temperature gradient during liquid immersion is reduced or averted. <P>SOLUTION: The liquid immersion lithographic apparatus, arranged in a space wherein one or a plurality of liquid distributors are enclosed by a liquid confinement structure, is released. The function of the liquid distributor is to prevent the formation of one or a plurality of recycle zones which often produce changes in the refractive index of the immersion liquid in the space or, as a result, sometimes produce map error. <P>COPYRIGHT: (C)2009,JPO&INPIT |
