| 摘要 |
PROBLEM TO BE SOLVED: To acquire a transmission EBSD orientation map image of high resolution by a transmission type EBSD method capable of creating a stable high-contrast Kikuchi line diffraction pattern.SOLUTION: Crystal orientation is analyzed using a specimen holder having a reflector that reflects transmission electron beams other than diffraction electron beams so that, when the variation in the intensity of the diffraction electron beams forming an EBSD pattern is large, the transmission electron beams other than the diffraction electron beams having transmitted through a specimen arrive at a fluorescent screen of the EBSD pattern detector. |
