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发明名称
SPUTTERING
摘要
申请公布号
GB2015581(B)
申请公布日期
1982.02.10
申请号
GB19790008628
申请日期
1979.03.12
申请人
ULTRA ELECTRONIC CONTROLS LTD
发明人
分类号
C23C14/35;(IPC1-7):C23C15/00
主分类号
C23C14/35
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