发明名称 Electronic beam device for projecting an image of an object on a sample
摘要 An electronic beam device is provided for projecting the image of an object on a sample, including two electromagnetic lens reduction stages. A single insulating tube is disposed between an object and the same plane, this tube having an inner metallized face.
申请公布号 US4798953(A) 申请公布日期 1989.01.17
申请号 US19870037343 申请日期 1987.04.13
申请人 THOMSON-CSF 发明人 DE CHAMBOST, EMMANUEL
分类号 H01J37/153;H01J37/16;H01J37/30;(IPC1-7):G01N23/00 主分类号 H01J37/153
代理机构 代理人
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