GRAPHITE JIG FOR LIQUID EPITAXIAL GROWTH,申请号JP19870333230-传众专利搜索

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发明名称	GRAPHITE JIG FOR LIQUID EPITAXIAL GROWTH
摘要
申请公布号	JPH01176290(A)	申请公布日期	1989.07.12
申请号	JP19870333230	申请日期	1987.12.28
申请人	IBIDEN CO LTD	发明人	MINOURA SEIJI
分类号	H01L21/208;C30B19/06	主分类号	H01L21/208
代理机构		代理人
主权项
地址

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