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发明名称
Method for manufacturing semiconductor memory device having improved resistance to alpha particle induced soft errors
摘要
申请公布号
US5030586(A)
申请公布日期
1991.07.09
申请号
US19880282803
申请日期
1988.12.12
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA
发明人
MATSUDA, YOSHIO;FUJISHIMA, KAZUYASU
分类号
H01L27/10;H01L21/8242;H01L27/108
主分类号
H01L27/10
代理机构
代理人
主权项
地址
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