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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04275416(A)
申请公布日期
1992.10.01
申请号
JP19910037249
申请日期
1991.03.04
申请人
MATSUSHITA ELECTRON CORP
发明人
FUKUMOTO HIROBUMI
分类号
H01L21/027;H01L21/30
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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