发明名称 Method of forming crystal
摘要 A crystal forming method comprises disposing, on a surface of a substrate or in recessed portion formed in the substrate having a surface with a low nucleation density, primary seed having a sufficient small volume to singly aggregate and a rectangular prismatic or cubic shape in which all the sides and the bottom are surrounded by an insulator in contact therewith; performing heat treatment for aggregating the primary seed to form monocrystalline seed crystal having controlled plane orientation and in-plane orientation; and selectively growing monocrystal by crystal growth treatment using the seed crystal as starting point.
申请公布号 US5580381(A) 申请公布日期 1996.12.03
申请号 US19950552439 申请日期 1995.11.03
申请人 CANON KABUSHIKI KAISHA 发明人 YAMAGATA, KENJI
分类号 C30B25/18;H01L21/20;(IPC1-7):C30B25/04 主分类号 C30B25/18
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