| 摘要 |
PROBLEM TO BE SOLVED: To provide a coordinate distortion correction method capable of obtaining a reticle without causing any distortion. SOLUTION: A positioned grid pattern is plotted on the reticle 11, and by measuring the coordinate of the plotted grid pattern by a size measuring device, a difference between with an ideal grid pattern is found, and coordinate distortion in an XY stage 10 is found. This coordinate distortion is stored beforehand in a correction table 31 as the specific coordinate distortion of its laser reticle plotting device. When a real pattern is plotted on the reticle 11, by plotting correcting a control amount based on the correction table 31 based on an XY instructed position of its pattern plotting, the rear pattern is plotted as the required pattern in real time. That is, even when the specific coordinate distortion exists on the XY stage 10, the high quality reticle without distortion is obtained without exchanging for another XY stage. |
