PERIPHERAL ALIGNER AND METHOD THEREFOR,申请号JP19970320157-传众专利搜索

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发明名称	PERIPHERAL ALIGNER AND METHOD THEREFOR
摘要
申请公布号	JPH11154639(A)	申请公布日期	1999.06.08
申请号	JP19970320157	申请日期	1997.11.20
申请人	ORC MFG CO LTD	发明人	MORITA AKIRA;YOSHIDA YUSUKE
分类号	G03F7/20;H01L21/027;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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