| 摘要 |
PROBLEM TO BE SOLVED: To enable proper adjustment of the shape of the polishing surface of a platen and to enable the execution of a high precise abrasion work. SOLUTION: Pressure adjusting flow passages 401-405 disposed approximately in parallel to a polishing surface and a supply and exhaust mechanism to effect supply and exhaust of fluid to and from the pressure adjusting flow passage are situated at the internal part of a turn table 10 in a state to be intercommunicated through a distributor. A polishing device is situated to be adjustable of the shape of the polishing surface of the turn table by controlling the temperature, the flow rate, and the pressure of fluid supplied and exhausted between the supply exhaust mechanism and the pressure adjusting flow passage. The pressure adjusting flow passages 401-405 are situated in a plurality of flow passages independent from each other. Each of the pressure adjusting flow passages is individually communicated with the supply and exhaust mechanism and situated such that the temperature, the flow rate, the pressure or the velocity of flow of fluid flowing to each of the pressure adjusting flow passages is individually controllable. |
