| 摘要 |
PROBLEM TO BE SOLVED: To provide an exposure device and an exposure method by which resolution and a throughput are made compatible and the various kinds of devices such as the high-performance liquid crystal display device can be inexpensively manufactured and to provide a storage medium recording the program. SOLUTION: This exposure device is provided with such special constitution that one substrate stage 16 is shared by two exposure optical system 12 and 14 having mutually different resolution. The optical system 12 and 14 are constituted so that not only the resolution thereof are different but also the shot-size thereof, that means, the areas which can be exposed at a time are different. That means, trade-off relation is generally established between the resolution and the shot-size of the exposure optical system. Therefore the shot-size of the optical system having the high resolution is small and that of the optical system having the low resolution is large. By respectively utilizing these characteristics, precise exposure processing can be executed with the high throughput.
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