发明名称 |
Partial semiconductor wafer processing using wafermap display |
摘要 |
Partial wafer processing is achieved by down loading the wafer map of the whole wafer from a host (2) and display the whole wafer in the die bonder monitor (3) move the wafer table to a first die pickup position (4) and move the display cursor to the first die pickup position (5) and teach two limit die coordinates in X direction (6) and teach two limit die coordinates in Y direction (7) and then using limit die coordinates as information remove other partial wafer die coordinates from the map (8) and select die pickup sequence (9).
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申请公布号 |
US6156625(A) |
申请公布日期 |
2000.12.05 |
申请号 |
US19990262554 |
申请日期 |
1999.03.04 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
BALAMURUGAN, SUBRAMANIAN |
分类号 |
H01L21/00;H01L21/68;(IPC1-7):H01L21/46;H01L21/78;H01L21/301;G01C17/38;G01P21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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