| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for manufacturing high-purity gas which reduces an installation cost and equipment installationa area and is capable of solving the degradation in the recovery rate of the high-purity gas, such as high-purity hydrogen, which is a problem on the adsorption by fewer adsorption columns by using a two-column type PSA apparatus which is made compact. SOLUTION: This method for manufacturing the high-purity gas by the pressure fluctuation adsorption apparatus is characterized in that, when one column of the two-column type pressure fluctuation adsorption apparatus is in an adsorption process step, the respective process steps of a pressure reducing process step, a blowdown process step, a purging process step and a boosting process step are successively carried out in the other column and the gas substantially not containing the impurities discharged in the post steps of the pressure reducing process step and the purging process step or containing the impurities to a lesser extent is circulated to gaseous raw material.</p> |
