发明名称 LAMP AND HEAT TREATMENT DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a lamp in which the temperature of an object to be treated is raised at high speed and which is superior in economical efficiency and to provide a heat treatment device using the lamp. SOLUTION: The lamp as one side has a light emitting part emitting light for performing prescribed heat treatment on the object to be treated and a reflector reflecting light emitted from the light emitting part on the object to be treated. The light emitting part and the reflector are attachably and detachably fitted to a lamp holding part supporting and cooling the lamp.
申请公布号 JP2002261037(A) 申请公布日期 2002.09.13
申请号 JP20010058266 申请日期 2001.03.02
申请人 TOKYO ELECTRON LTD 发明人 SHIMIZU MASAHIRO
分类号 H05B3/00;H01K7/00;H01L21/26;H01L21/302;H01L21/306;H01L21/31;(IPC1-7):H01L21/26 主分类号 H05B3/00
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