发明名称 |
LAMP AND HEAT TREATMENT DEVICE USING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a lamp in which the temperature of an object to be treated is raised at high speed and which is superior in economical efficiency and to provide a heat treatment device using the lamp. SOLUTION: The lamp as one side has a light emitting part emitting light for performing prescribed heat treatment on the object to be treated and a reflector reflecting light emitted from the light emitting part on the object to be treated. The light emitting part and the reflector are attachably and detachably fitted to a lamp holding part supporting and cooling the lamp.
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申请公布号 |
JP2002261037(A) |
申请公布日期 |
2002.09.13 |
申请号 |
JP20010058266 |
申请日期 |
2001.03.02 |
申请人 |
TOKYO ELECTRON LTD |
发明人 |
SHIMIZU MASAHIRO |
分类号 |
H05B3/00;H01K7/00;H01L21/26;H01L21/302;H01L21/306;H01L21/31;(IPC1-7):H01L21/26 |
主分类号 |
H05B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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