| 摘要 |
PROBLEM TO BE SOLVED: To provide a corrosion resistant material which is excellent in corrosion resistance to halogen based corrosive gas, e.g., used for a semiconductor production process, has satisfactory durability in a fluoride passive layer, and has reduced generation in contaminated gas on use, and to provide its production method. SOLUTION: The corrosion resistant material consists of a nickel layer or a nickel alloy layer formed on the surface of a base material consisting of metal or the like, a nickel oxide layer formed on the surface thereof and a nickel fluoride layer formed on the surface of the nickel oxide layer. COPYRIGHT: (C)2005,JPO&NCIPI
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